LONDON — Dutch photolithography company ASML won a legal victory Tuesday (June 21) when an Oakland, California federal district court jury, found that a patent held by Ultratech Inc. was invalid and ...

Modern photolithography machines must deliver extraordinary precision on a repeatable basis, and in high volume production. In response to demands for increased throughput in the semiconductor ...

SANTA CLARA, Calif. — ASML Holding NV is to install a Twinscan XT:1250i step and scan system for immersion lithography, at the Maydan Technology Center (MTC) of Applied Materials Inc. early 2005, ASML ...

A disclosure on China's government procurement platform shows that Shanghai Micro Electronics Equipment (SMEE) has won a ...