As semiconductor chip technology advances towards nanometre and sub-nanometre scales, the demands becomes exponentially more ...

In scanning electron microscopy, the deposition of electron beam induced hydrocarbon contamination is considered to be a persistent problem. Deposition of contamination on a sample is usually an ...

Electron Beam Lithography (EBL) is a specialized technique for creating the extremely fine patterns required by the modern electronics industry for integrated circuits. This is possible due to the ...