The term nanolithography is derived from the Greek words “nanos”, meaning Dwarf; “lithos”, meaning rock; and “grapho” meaning to write. Therefore the literal translation is "tiny writing on rocks".

From materials science to biotechnology, the field of nanotechnology has branched out into various areas of research. Several of these applications are predicated on the capacity to fabricate or ...

Extreme ultraviolet light (EUV light) does not naturally occur on Earth, but it can be produced. In nanolithography machines, EUV light is generated using an immensely hot tin plasma. Researchers at ...

The semiconductor industry has invested huge amounts of money in future lithographic techniques leading to pattern generation with a resolution of only several nanometers. But now, with a few talented ...

Scientists at the Georgia Institute of Technology have developed a new technique for nanolithography that is extremely fast and capable of being used in a range of environments including air (outside ...

Physicists have created a "nano-violin" so small that it could fit within the width of a human hair. This is not only good news for anyone feeling sorry for themselves – it also demonstrates the ...

A team of 12 Georgetown University professors will be adding a new three-dimensional nanolithography instrument, a tool used to create small structures that are measured in nanometers, to the ...

JMAR Technologies Inc. today said its research arm has secured a $34.5 million contract with the Defense Advanced Research Projects Agency (DARPA) that will allow it to advance its research of X-ray ...

Recently, a joint research team from Hangzhou Institute of Technology of Xidian University, Humboldt University and the Max Born Institute announced a breakthrough in fabricating high-precision ...