Vol. 362, No. 1814, Sputtering: Past, Present and Future. W. R. Grove 150th Anniversary Issue (Jan. 15, 2004), pp. 5-28 (24 pages) Measurement of the velocity distribution of sputtered atoms has ...
Thin film technology focuses on the deposition and analysis of functional material layers on a substrate. These layers are essential building blocks in modern devices, like the microchips found in ...
Thin films play a crucial role in the fabrication of several components and devices, such as protective coatings, integrated circuits, solar cells, and optical ...
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