TL;DR: SK hynix is advancing its next-generation 1c DRAM using over five EUV layers, enhancing 16Gb DDR5 DRAM production with planned investments starting late 2024. The company is also preparing for ...
Something to look forward to: Samsung has announced that it's begun mass producing 14-nanometer (nm) DRAM, the industry's smallest, that will be formed on extreme ultraviolet (EUV) technology. The ...
Today’s leading-edge chip designs require a new class of metrology that goes beyond optical target-based approximation, statistical sampling and single-layer control PROVision® 3E system combines ...
This paper reports the readiness of key EUV resist process technologies using Metal Oxide Resist (MOR) aiming for the DRAM application. For MOR, metal contamination reduction and CD uniformity (CDU) ...
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